Complete Factorial Experiment
/****************************************************************/
/* S A S S A M P L E L I B R A R Y */
/* */
/* NAME: FACTEX16 */
/* TITLE: Complete Factorial Experiment */
/* PRODUCT: QC */
/* SYSTEM: ALL */
/* KEYS: Design of Experiments, Factorial Designs, */
/* PROCS: FACTEX GLM */
/* DATA: */
/* */
/* REF: SAS/QC Software: Usage and Reference, Version 6, */
/* First Edition, Volume 1 and Volume 2 */
/* */
/* Yin, G.Z. and Jillie, D.W. (1987), "Orthogonal */
/* Design for Process Optimization and its Application */
/* in Plasma Etching," Solid State Technology, */
/* May, 127-132. */
/* */
/* MISC: */
/* */
/****************************************************************/
proc factex;
factors Power Flow Pressure Gap;
output out=EtcherDesign
Power nvals=(0.80 1.20)
Flow nvals=(4.50 550)
Pressure nvals=(125 200)
Gap nvals=(275 325);
run;
data EtcherDesign;
set EtcherDesign;
input Rate @@;
datalines;
550 669 604 650 633 642 601 635
1037 749 1052 868 1075 860 1063 729
;
title 'Nitride Etch Process Experiment';
proc print;
run;
proc glm data=EtcherDesign;
class Power Flow Pressure Gap;
model rate=Power|Flow|Pressure|Gap@2 / ss1;
run;
title;