Complete Factorial Experiment

/****************************************************************/
/*          S A S   S A M P L E   L I B R A R Y                 */
/*                                                              */
/*    NAME: FACTEX16                                            */
/*   TITLE: Complete Factorial Experiment                       */
/* PRODUCT: QC                                                  */
/*  SYSTEM: ALL                                                 */
/*    KEYS: Design of Experiments, Factorial Designs,           */
/*   PROCS: FACTEX GLM                                          */
/*    DATA:                                                     */
/*                                                              */
/*     REF: SAS/QC Software:  Usage and Reference, Version 6,   */
/*          First Edition, Volume 1 and Volume 2                */
/*                                                              */
/*          Yin, G.Z. and Jillie, D.W. (1987), "Orthogonal      */
/*          Design for Process Optimization and its Application */
/*          in Plasma Etching," Solid State Technology,         */
/*          May, 127-132.                                       */
/*                                                              */
/*    MISC:                                                     */
/*                                                              */
/****************************************************************/

proc factex;
   factors Power Flow Pressure Gap;
   output out=EtcherDesign
          Power    nvals=(0.80 1.20)
          Flow     nvals=(4.50 550)
          Pressure nvals=(125  200)
          Gap      nvals=(275  325);
run;

data EtcherDesign;
   set EtcherDesign;
   input Rate @@;
   datalines;
   550   669  604   650  633   642  601   635
   1037  749  1052  868  1075  860  1063  729
   ;

title 'Nitride Etch Process Experiment';
proc print;
run;

proc glm data=EtcherDesign;
   class Power Flow Pressure Gap;
   model rate=Power|Flow|Pressure|Gap@2 / ss1;
run;

title;