| Fractional Factorial Designs with Blocks and Center Points |
Tying It All Together
The significant factors for thickness are TEMP, FLOW, ETCH, and TIME. TEMP is involved in significant interactions with ETCH and TIME. There are no significant effects for resistivity. The next step is to perform a response surface experiment with just these four factors, to determine the optimum setting by including curvature effects in the model. This will be done in Chapter 7.
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